Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7700898 | Heat treatment equipment and method of driving the same | Dae-Man Seo, Dae-Woo Kim | 2010-04-20 |
| 7268895 | Inspection system and a method for inspecting a semiconductor wafer | Kwang-Woon Lee, Wook-Sung Son | 2007-09-11 |
| 6211010 | Method of forming hemispherical grains on a surface comprising pre-cleaning the surface in-situ with plasma | Se Hyoung Ryu, Chan-Sik Park, Eung Yong Ahn, Yun Young Kwon | 2001-04-03 |