Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7491118 | Chemical mechanical polishing apparatus and methods using a polishing surface with non-uniform rigidity | Hyun Joo Yun, Young-Sam Lim | 2009-02-17 |
| 7090570 | Chemical mechanical polishing apparatus and methods using a polishing surface with non-uniform rigidity | Hyun Joo Yun, Young-Sam Lim | 2006-08-15 |