Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7491118 | Chemical mechanical polishing apparatus and methods using a polishing surface with non-uniform rigidity | Young-Sam Lim, Jae Pil Boo | 2009-02-17 |
| 7090570 | Chemical mechanical polishing apparatus and methods using a polishing surface with non-uniform rigidity | Young-Sam Lim, Jae Pil Boo | 2006-08-15 |
| 7044833 | Apparatus for transporting and polishing wafers | Sang-Seon Lee, Jong Bok Kim, Kwang Hee Lee, Min Su Kim, Hyun-Sung Lee | 2006-05-16 |