Issued Patents All Time
Showing 51–52 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429107 | Method for forming conductive contact of semiconductor device | Byeong-yun Nam, Kyung Won Park | 2002-08-06 |
| 5789116 | Half-tone phase shift masks and fabricating methods therefor including phase shifter pattern and phase shifting groove | — | 1998-08-04 |