Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984344 | Lift apparatus and substrate processing apparatus including the same | Byeongsang Kim, Keonwoo KIM, Wooram Kim, Eungsu Kim, Heewon Min +4 more | 2024-05-14 |
| 11404252 | Electrostatic chuck and substrate processing apparatus including the same | Byeongsang Kim, Keonwoo KIM, Eungsu Kim, Hakyoung Kim, Heewon Min +4 more | 2022-08-02 |