Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11960212 | Extreme ultraviolet lithography device and method of operating extreme ultraviolet lithography device | Seongbo Shim, Hyungjong Bae, Chan Hwang | 2024-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11960212 | Extreme ultraviolet lithography device and method of operating extreme ultraviolet lithography device | Seongbo Shim, Hyungjong Bae, Chan Hwang | 2024-04-16 |