Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7804596 | Overlay key, method of forming the overlay key and method of measuring overlay accuracy using the overlay key | — | 2010-09-28 |
| 7732105 | Photomask with overlay mark and method of fabricating semiconductor device | Ji-Yong You, Joong-Sung Kim, Hyung-Joo Youn | 2010-06-08 |
| 7288848 | Overlay mark for measuring and correcting alignment errors | Dong Hun Lee, Jong-Hyon Ahn, Sung-Gun Kang | 2007-10-30 |
| 7236245 | Overlay key with a plurality of crossings and method of measuring overlay accuracy using the same | — | 2007-06-26 |
| 6841338 | Photoresist composition and method of forming a photoresist pattern with a controlled remnant ratio | Dae-Youp Lee, Jeong-Lim Nam, Jeung-woo Lee | 2005-01-11 |