Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723437 | Semiconductor processing component having low surface contaminant concentration | Andrew G. Haerle | 2004-04-20 |
| 6565667 | Process for cleaning ceramic articles | Andrew G. Haerle | 2003-05-20 |
| 6296716 | Process for cleaning ceramic articles | Andrew G. Haerle | 2001-10-02 |