Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10640680 | Chemical-mechanical processing slurry and methods | Lu Tian, Ke Zhang, Hon Wu Lau | 2020-05-05 |
| 9410063 | Polishing slurry including zirconia particles and a method of using the polishing slurry | Jun Wang, Frederic Wiss | 2016-08-09 |
| 9343321 | Chemical mechanical planarization using nanodiamond | Jun Wang, Ronald W. Laconto | 2016-05-17 |
| 9120200 | Polishing slurry including zirconia particles and a method of using the polishing slurry | Jun Wang, Frederic Wiss | 2015-09-01 |
| 8980113 | Chemical mechanical planarization using nanodiamond | Jun Wang, Ronald W. Laconto | 2015-03-17 |
| 8685123 | Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material | Jun Wang | 2014-04-01 |
| 8343415 | Ceramic particulate material and processes for forming same | Ralph Bauer, Doruk O. Yener, Claire M. Theron, Michael D. Kavanaugh | 2013-01-01 |
| 8216328 | Ceria material and method of forming same | Jun Wang | 2012-07-10 |
| 8105135 | Polishing slurries | Ronald W. Laconto | 2012-01-31 |
| 7993420 | Ceria material and method of forming same | Jun Wang | 2011-08-09 |
| 7727919 | High resistivity silicon carbide | Edward A. Perry | 2010-06-01 |
| 7053411 | Method for treating semiconductor processing components and components formed thereby | Richard F. Buckley, Richard R. Hengst | 2006-05-30 |
| 6881262 | Methods for forming high purity components and components formed thereby | Han Chang | 2005-04-19 |
| 6825123 | Method for treating semiconductor processing components and components formed thereby | Richard F. Buckley, Richard R. Hengst | 2004-11-30 |
| 6723437 | Semiconductor processing component having low surface contaminant concentration | Gerald S. Meder | 2004-04-20 |
| 6565667 | Process for cleaning ceramic articles | Gerald S. Meder | 2003-05-20 |
| 6554909 | Process for cleaning components using cleaning media | Edward A. Perry | 2003-04-29 |
| 6403155 | High purity, siliconized silicon carbide having high thermal shock resistance | Dominique Dubots | 2002-06-11 |
| 6296716 | Process for cleaning ceramic articles | Gerald S. Meder | 2001-10-02 |
| 6162543 | High purity siliconized silicon carbide having high thermal shock resistance | Dominique Dubots | 2000-12-19 |
| 5599407 | Method for estimating inclusion content of metals using reflectance | Barry A. Mikucki | 1997-02-04 |