Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5604313 | Varying apparent mass accelerometer | Kenichi Nakamura | 1997-02-18 |
| 5545594 | Semiconductor sensor anodic-bonding process, wherein bonding of corrugation is prevented | — | 1996-08-13 |
| 5528070 | Semiconductor sensor manufactured through anodic-bonding process | — | 1996-06-18 |
| 5484745 | Method for forming a semiconductor sensor | — | 1996-01-16 |
| 5444244 | Piezoresistive cantilever with integral tip for scanning probe microscope | Michael D. Kirk, Ian R. Smith, Marco Tortonese, Timothy G. Slater | 1995-08-22 |
| 5393647 | Method of making superhard tips for micro-probe microscopy and field emission | Armand P. Neukermans, Timothy G. Slater, Linda E. Whittlesey | 1995-02-28 |