Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11880135 | Photoresist compositions and pattern formation methods | Mitsuru Haga, Shugaku Kushida | 2024-01-23 |
| 10962880 | Radiation-sensitive compositions and patterning and metallization processes | Mitsuru Haga, Shugaku Kushida, James F. Cameron | 2021-03-30 |
| 10527935 | Radiation-sensitive compositions and patterning and metallization processes | Mitsuru Haga, Shugaku Kushida, James F. Cameron | 2020-01-07 |