| 12055475 |
Method of reducing false-positive particle counts of an interference particle sensor module |
Hans Spruit, Alexander Marc Van Der Lee, Philipp Henning Gerlach, Robert Wolf, Matthias Falk |
2024-08-06 |
| 11543273 |
Method and apparatus for determining the absolute value of the flow velocity of a particle-transporting medium |
Alexander Marc Van Der Lee, Hans Spruit |
2023-01-03 |
| 10935483 |
Optical particle sensor device and method for operating an optical particle sensor device |
Alexander Marc Van Der Lee, Soren Sofke, Hans Spruit, Jens-Alrik Adrian |
2021-03-02 |
| 10782221 |
System and method for determining a particle contamination |
Stefan Weiss, Alexander Herrmann, Robert Wolf, Alexander Marc Van Der Lee, Wolfram Johannes Martin Lyda +6 more |
2020-09-22 |
| 10429239 |
Color capture arrangement and correction method using the color capture arrangement |
Manfred Kemmler, Dirk Trueper |
2019-10-01 |
| 9684251 |
Microlithographic projection exposure apparatus and method of correcting optical wavefront deformations in such an apparatus |
Joerg Holzmann, Toralf Gruner |
2017-06-20 |
| 4813159 |
Foot support for optimum recovery |
— |
1989-03-21 |
| 4674201 |
Foot support |
— |
1987-06-23 |
