Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9134617 | Solvent developable negative resist composition, resist pattern formation method, and method for forming pattern of layer including block copolymer | Takahiro Senzaki, Ken Miyagi, Shigenori Fujikawa, Mari Koizumi | 2015-09-15 |
| 9060415 | Method for producing substrate having surface nanostructure | Shigenori Fujikawa, Takahiro Senzaki, Ken Miyagi | 2015-06-16 |
| 8999631 | Primer and pattern forming method for layer including block copolymer | Takahiro Senzaki, Takahiro Dazai, Ken Miyagi, Shigenori Fujikawa, Mari Koizumi | 2015-04-07 |
| 8961802 | Method of forming fine pattern, and developer | Shigenori Fujikawa, Takahiro Senzaki, Ken Miyagi | 2015-02-24 |