Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8426315 | Method of manufacturing semiconductor device | Shouji Tochishita, Kenji Nishihara, Tadao Uehara, Kiyotaka Ishibushi | 2013-04-23 |
| 8116894 | Chemical mechanical polishing method and chemical mechanical polishing device | Masanori Miyata, Taro USAMI, Koichi Sogawa, Kenji Nishihara, Tadao Uehara +5 more | 2012-02-14 |
| 7755207 | Wafer, reticle, and exposure method using the wafer and reticle | Koichi Sogawa, Kiyoshi Yano, Hidetsugu Miyake, Shouji Tochishita, Minoru Ohtomo +1 more | 2010-07-13 |