Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8426315 | Method of manufacturing semiconductor device | Kenji Nishihara, Tohru Haruki, Tadao Uehara, Kiyotaka Ishibushi | 2013-04-23 |
| 7755207 | Wafer, reticle, and exposure method using the wafer and reticle | Koichi Sogawa, Kiyoshi Yano, Tohru Haruki, Hidetsugu Miyake, Minoru Ohtomo +1 more | 2010-07-13 |