Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594489 | Semiconductor device and method of manufacturing the same | Kazuhide FUKAYA, Makoto KOSHIMIZU | 2023-02-28 |
| 10872813 | Method of manufacturing semiconductor device | Mitsuhiro SUKEGAWA, Yoshinori Matsumuro, Kentaro Yamada | 2020-12-22 |
| 10224214 | Manufacturing method of semiconductor device | Kotaro Horikoshi, Masatoshi Akaishi, Yuji Kikuchi | 2019-03-05 |
| 10043884 | Manufacturing method for semiconductor device | — | 2018-08-07 |
| 9935023 | Methods for manufacturing semiconductor device and for detecting end point of dry etching | Kazuhide FUKAYA, Kentaro Yamada | 2018-04-03 |
| 9818620 | Manufacturing method of semiconductor device | Kotaro Horikoshi, Masatoshi Akaishi, Yuji Kikuchi | 2017-11-14 |
| 9761685 | Manufacturing method for semiconductor device | — | 2017-09-12 |
| 9711423 | Methods for manufacturing semiconductor device and for detecting end point of dry etching | Kazuhide FUKAYA, Kentaro Yamada | 2017-07-18 |
| 9666445 | Manufacturing method of semiconductor device | Kotaro Horikoshi, Masatoshi Akaishi, Yuji Kikuchi | 2017-05-30 |
| 9595468 | Method of manufacturing semiconductor device that uses treatment to enhance hydrophilicity of spin coated insulating film | Kazuhide FUKAYA | 2017-03-14 |