Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594489 | Semiconductor device and method of manufacturing the same | Toshikazu HANAWA, Makoto KOSHIMIZU | 2023-02-28 |
| 9935023 | Methods for manufacturing semiconductor device and for detecting end point of dry etching | Toshikazu HANAWA, Kentaro Yamada | 2018-04-03 |
| 9711423 | Methods for manufacturing semiconductor device and for detecting end point of dry etching | Toshikazu HANAWA, Kentaro Yamada | 2017-07-18 |
| 9595468 | Method of manufacturing semiconductor device that uses treatment to enhance hydrophilicity of spin coated insulating film | Toshikazu HANAWA | 2017-03-14 |