| 10050011 |
Method of manufacturing semiconductor device |
Masatoshi Yasunaga, Tatsuya Hirai, Soshi Kuroda |
2018-08-14 |
| 9589923 |
Method of manufacturing semiconductor device |
Masatoshi Yasunaga, Tatsuya Hirai, Soshi Kuroda |
2017-03-07 |
| 9130062 |
Method of manufacturing semiconductor device |
Masatoshi Yasunaga, Tatsuya Hirai, Soshi Kuroda |
2015-09-08 |
| 9087816 |
Semiconductor device and method of manufacturing the same |
Soshi Kuroda, Hironori Matsushima, Masatoshi Yasunaga, Akira Yamazaki |
2015-07-21 |
| 9024454 |
Method of manufacturing semiconductor device |
Masatoshi Yasunaga, Hironori Matsushima, Soshi Kuroda |
2015-05-05 |
| 8772952 |
Semiconductor device with copper wire having different width portions |
Masatoshi Yasunaga, Hironori Matsushima, Soshi Kuroda |
2014-07-08 |
| 8692383 |
Semiconductor device and method of manufacturing the same |
Soshi Kuroda, Hironori Matsushima, Masatoshi Yasunaga, Akira Yamazaki |
2014-04-08 |
| 8629002 |
Manufacturing method of semiconductor device |
Soshi Kuroda, Masatoshi Yasunaga, Hironori Matsushima |
2014-01-14 |
| 8605277 |
Method of inspecting semiconductor device |
Satoshi Yamada, Takashi Karashima, Masatoshi Yasunaga, Yuji Fujimoto |
2013-12-10 |
| 8334172 |
Manufacturing method of semiconductor device |
Soshi Kuroda, Masatoshi Yasunaga, Hironori Matsushima |
2012-12-18 |