Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6683011 | Process for forming hafnium oxide films | Ryan C. Smith, Tiezhong Ma, Stephen A. Campbell | 2004-01-27 |
| 5372849 | Chemical vapor deposition of iron, ruthenium, and osmium | Fred B. McCormick, Yoshihide Senzaki | 1994-12-13 |
| 5314727 | Chemical vapor deposition of iron, ruthenium, and osmium | Fred B. McCormick, Yoshihide Senzaki | 1994-05-24 |
| 5191099 | Chemical vapor deposition of aluminum films using dimethylethylamine alane | Everett C. Phillips | 1993-03-02 |
| 4923717 | Process for the chemical vapor deposition of aluminum | David C. Boyd | 1990-05-08 |
| 4832986 | Process for metal nitride deposition | Daniel R. Mantell, John F. Evans, Roland K. Schulze | 1989-05-23 |