Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4818334 | Method of etching a layer including polysilicon | Michael F. Leahy | 1989-04-04 |
| 4543130 | Megasonic cleaning apparatus and method | — | 1985-09-24 |
| 4261791 | Two step method of cleaning silicon wafers | — | 1981-04-14 |