Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8644528 | Microfabricated microphone | — | 2014-02-04 |
| 8372677 | Three-axis accelerometers and fabrication methods | — | 2013-02-12 |
| 8280882 | Automatic expert identification, ranking and literature search based on authorship in large document collections | Adam Troy, Guo-Qiang Zhang | 2012-10-02 |
| 8173470 | Three-axis accelerometers and fabrication methods | — | 2012-05-08 |
| 8153280 | Composition comprising silicon carbide | Christian A. Zorman, Xiao-An Fu, Jeremy Dunning | 2012-04-10 |
| RE42887 | Silicon carbide and other films and method of deposition | Christian A. Zorman, Xiao-An Fu, Jeremy Dunning | 2011-11-01 |
| 7892876 | Three-axis accelerometers and fabrication methods | — | 2011-02-22 |
| 7578189 | Three-axis accelerometers | — | 2009-08-25 |
| 7261919 | Silicon carbide and other films and method of deposition | Christian A. Zorman, Xiao-An Fu, Jeremy Dunning | 2007-08-28 |
| 7130802 | Systems and methods for facilitating research and development | Kaigham J. Gabriel | 2006-10-31 |
| 7029183 | Optical fiber array connector | Jeffrey M. Melzak | 2006-04-18 |
| 6360424 | Method of making micromotors with utilitarian features | Francis L. Merat | 2002-03-26 |
| 6171972 | Fracture-resistant micromachined devices | Christopher A. Bang, Kevin Stark | 2001-01-09 |
| 6136243 | Method for molding high precision components | Narayanan Rajan, Christian A. Zorman | 2000-10-24 |
| 6046659 | Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications | Robert Y. Loo, Adele Schmitz, Julia J. Brown, Jonathan J. Lynch, Debabani Choudhury +6 more | 2000-04-04 |
| 6029337 | Methods of fabricating micromotors with utilitarian features | Francis L. Merat | 2000-02-29 |
| 5966066 | Micromechanical memory sensor | Kenneth G. Goldman, Vijayakumar R. Dhuler | 1999-10-12 |
| 5712609 | Micromechanical memory sensor | Kenneth G. Goldman, Vijayakumar R. Dhuler | 1998-01-27 |
| 5705318 | Micromotors and methods of fabrication | Keren Deng | 1998-01-06 |
| 5579583 | Microfabricated blades | Randal H. Rudderman, Robert L. Mullen | 1996-12-03 |
| 5093594 | Microfabricated harmonic side-drive motors | — | 1992-03-03 |
| 5043043 | Method for fabricating side drive electrostatic micromotor | Roger T. Howe, Jeffrey H. Lang, Martin F. Schlecht, Martin Schmidt, Stephen D. Senturia +1 more | 1991-08-27 |
| 4942767 | Pressure transducer apparatus | Joseph H. Haritonidis, Stephen D. Senturia, David J. Warkentin | 1990-07-24 |
| 4926696 | Optical micropressure transducer | Joseph H. Haritonidis, Stephen D. Senturia, David J. Warkentin | 1990-05-22 |
| 4864824 | Thin film shape memory alloy and method for producing | Kaigham J. Gabriel, James A. Walker | 1989-09-12 |