Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8394656 | Method of creating MEMS device cavities by a non-etching process | Chun-Ming Wang, Teruo Sasagawa | 2013-03-12 |
| 7795061 | Method of creating MEMS device cavities by a non-etching process | Chun-Ming Wang, Teruo Sasagawa | 2010-09-14 |