Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985611 | Method for manufacturing integrated MEMS resonator device | Tony Ivanov, Julio C. Costa | 2011-07-26 |
| 7868403 | Integrated MEMS resonator device | Tony Ivanov, Julio C. Costa | 2011-01-11 |
| 7863071 | Combined micro-electro-mechanical systems device and integrated circuit on a silicon-on-insulator wafer | Tony Ivanov, Julio C. Costa, Walter Wohlmuth | 2011-01-04 |
| 7745892 | Integrated MEMS switch | Tony Ivanov, Julio C. Costa | 2010-06-29 |
| 7268463 | Stress release mechanism in MEMS device and method of making same | Gary Li, Daniel N. Koury, Jr. | 2007-09-11 |
| 7000473 | MEM structure having reduced spring stiction | Jan Edward Vandemeer, Bishnu Prasanna Gogoi | 2006-02-21 |
| 6228275 | Method of manufacturing a sensor | Daniel J. Koch, Daniel N. Koury, Jr., Jonathan Gorrell | 2001-05-08 |
| 6122963 | Electronic component for measuring acceleration | Daniel N. Koury, Jr., Richard J. August, Andrew C. McNeil | 2000-09-26 |
| 5914521 | Sensor devices having a movable structure | Ronald J. Gutteridge, Daniel N. Koury, Jr., Daniel J. Koch | 1999-06-22 |
| 5892252 | Chemical sensing trench field effect transistor and method for same | Young Sir Chung | 1999-04-06 |
| 5747839 | Chemical sensing trench field effect transistor | Young Sir Chung | 1998-05-05 |