Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9945570 | Unit and method for cooling, and apparatus and method for treating substrate | Seung-Kook Yang, Seong-Wook Lee | 2018-04-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9945570 | Unit and method for cooling, and apparatus and method for treating substrate | Seung-Kook Yang, Seong-Wook Lee | 2018-04-17 |