Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9637415 | Method of making high purity polycrystalline aluminum oxynitride bodies useful in semiconductor process chambers | Suri A. Sastri, Sreeram Balasubramanian | 2017-05-02 |
| 6530539 | Internal fluid cooled window assembly | Steven R. Collins, David B. James, David M. Blanchard, Steven E. Wirth | 2003-03-11 |
| 4781800 | Deposition of metal or alloy film | Wataru Ohashi, Frans Spaepen | 1988-11-01 |