Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508138 | Method of detecting photolithographic hotspots | Yi-Shiang Chang, Chia-Chi Lin, Shin-Shing Yeh, Pei-Shan Shih | 2016-11-29 |
| 7461472 | Half-tone phase shift mask and patterning method using thereof | — | 2008-12-09 |
| 7008733 | Method of improving a resolution of contact hole patterns by utilizing alternate phase shift principle | — | 2006-03-07 |
| 6200708 | Method for automatically determining adjustments for stepping photolithography exposures | — | 2001-03-13 |
| 6187486 | Method of multi-exposure for improving photolithography resolution | Yeur-Luen Tu, Chine-Gie Lou | 2001-02-13 |