Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4686531 | Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus | John R. Shambroom | 1987-08-11 |
| 4667108 | Impedance matched and thermally cooled deflection amplifiers for charged particle beam apparatus employing deflectors | David M. Walker | 1987-05-19 |
| 4661709 | Modular all-electrostatic electron-optical column and assembly of said columns into an array and method of manufacture | David M. Walker, Kenneth J. Harte, John J. Carrona | 1987-04-28 |
| 4539835 | Calibration apparatus for capacitance height gauges | John R. Shambroom | 1985-09-10 |
| 4538069 | Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus | John R. Shambroom | 1985-08-27 |
| 4455641 | Linear tracking system | — | 1984-06-19 |