Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Adiabatic plate for substrate processing appratus

Adiabatic plate for substrate processing appratus

US Patent D981972 · Granted Mar 28, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Internal combustion engine2025
Gas supply structure and substrate processing apparatus2025
Engine and method of controlling engine2025
Semiconductor device2025
Substrate processing apparatus, process vessel, method of manufacturing semicond2025
Substrate processing apparatus, process vessel, method of manufacturing semicond2025
Wafer support of semiconductor manufacturing apparatus2025
Semiconductor device and electronic equipment2025
Substrate lifter for semiconductor manufacturing equipment2025
Substrate processing apparatus2024
Antenna device2024
Nozzle installation jig2024