Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer boat

Wafer boat

US Patent D769201 · Granted Oct 18, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Cleaning method and substrate processing apparatus2025
Processing apparatus and cleaning processing method2024
Cleaning method and processing apparatus2024
Control device, processing apparatus, and control method2024
Cleaning method and processing apparatus2023
Cleaning method and processing apparatus2022
Deposition method2022
Film forming apparatus, control device, and pressure gauge adjustment method2022
Substrate processing system, control device, and substrate processing method2019
Wafer boat2017
Wafer boat2017
Wafer boat2017