Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

US Patent 9977341 · Granted May 22, 2018

Estimated economic value: $11,239,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithographic apparatus and device manufacturing method2020
Lithographic apparatus and device manufacturing method2020
Lithographic apparatus and device manufacturing method2019
Lithographic apparatus and device manufacturing method2019
Lithographic apparatus and a device manufacturing method2019
Lithographic apparatus and device manufacturing method2018
Lithographic apparatus and device manufacturing method2018
Lithographic apparatus and device manufacturing method2017
Lithographic apparatus and device manufacturing method2017
Positioning system, a lithographic apparatus and a method for positional control2017
Lithographic apparatus and device manufacturing method2016
Lithographic apparatus and device manufacturing method2016