Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method for bearing a lithography mask

Apparatus and method for bearing a lithography mask

US Patent 9964862 · Granted May 8, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical system, in particular in a microlithographic projection exposure apparat2014
Method of measuring a shape of an optical surface based on computationally combi2013
Device and method for measuring lithography masks2012
Device for sealing a projection exposure apparatus2006
Optical system with isolated measuring structure2005
Lithographic apparatus and device manufacturing method2004
Process for manufacturing optical surfaces and shaping machine for carrying out 2003
Positioning device2001
Spectacle lens with spherical front side and multifocal back side and process fo2000
Process and apparatus for the measurement of object topographies by means of pro1995
Method for analyzing periodic brightness patterns1994
Method and apparatus for three-dimensional optical measurement of object surface1994