Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Charged particle microscope with vibration detection / correction

Charged particle microscope with vibration detection / correction

US Patent 9875879 · Granted Jan 23, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithographic systems and methods of operating the same2024
Lithographic systems and methods of operating the same2024
Lithographic systems and methods of operating the same2023
Electron microscope stage2022
Charged particle microscope with barometric pressure correction2017
Enclosure for acoustic insulation of an apparatus contained within said enclosur2016
Method for electron tomography2015
Variable reluctance device, stage apparatus, lithographic apparatus and device m2015
Lithographic apparatus and device manufacturing method2015
Electromagnetic actuator, stage apparatus and lithographic apparatus2014
Drift control in a charged particle beam system2013
Enclosure for acoustic insulation of an apparatus contained within said enclosur2012