Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › All-silicon electrode capacitive transducer on a glass substrate

All-silicon electrode capacitive transducer on a glass substrate

US Patent 9837935 · Granted Dec 5, 2017

Estimated economic value: $14,926,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods to provide real-time context-based avoidance mechanisms for 2025
Systems and methods for a four-mass vibrating MEMS structure2019
Hemitoroidal resonator gyroscope2017
MEMS vertical comb structure with linear drive/pickoff2016
Vibration isolation interposer die2016
Systems and methods for a three-layer chip-scale MEMS device2015
Two degree of freedom dithering platform for MEMS sensor calibration2015
Two degree of freedom dithering platform for MEMS sensor calibration2015
Two degree of freedom dithering platform for MEMS sensor calibration2014
Two degree of freedom dithering platform for MEMS sensor calibration2014
Systems and methods for an encoder and control scheme2014
Systems and methods for an encoder and control scheme2014