Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus and substrate detaching method

Substrate processing apparatus and substrate detaching method

US Patent 9831112 · Granted Nov 28, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing apparatus and substrate processing method2025
Substrate support and plasma processing apparatus2023
Stage and substrate processing apparatus2022
Processing apparatus for thermally processing a workpiece in a chamber2020
Mounting table and plasma processing apparatus2019
Substrate processing apparatus and maintenance method thereof2017