Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › CVD apparatus and method for forming CVD film

CVD apparatus and method for forming CVD film

US Patent 9831069 · Granted Nov 28, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of making semiconductor ferroelectric memory element, and semiconductor f2022
Semiconductor memory element, other elements, and their production methods2021
Method of making semiconductor ferroelectric memory element, and semiconductor f2020
Ferroelectric device and method of its manufacture2017
Evaporation method and film deposition method2017
Vaporizing apparatus and film forming apparatus provided with vaporizing apparat2013
Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD2010
Vaporizer and various devices using the same and an associated vaporizing method2010
Carburetor, various types of devices using the carburetor, and method of vaporiz2007
Method for producing silica particles2006
Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD2005
Method for manufacturing quartz glass crucible2003