Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Susceptors for enhanced process uniformity and reduced substrate slippage

Susceptors for enhanced process uniformity and reduced substrate slippage

US Patent 9799548 · Granted Oct 24, 2017

Estimated economic value: $27,129,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Self-aligning interferometric end point housing2025
Ink pack2025
Fluid valve2025
Liquid storage bag2025
Bipolar electrostatic chuck for etch chamber2024
Automated dry-in dry-out dual side polishing of silicon substrates with integrat2024
Liquid container2024
Cartridge, printing material supply system, and printing apparatus2024
Ink pack2024
Mineral processing method2023
Non-transitory computer-readable recording medium, estimation method, and inform2023
Methods and apparatus for cleaning a substrate after processing2023