Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System and method for measuring and improving overlay using electronic microscopic imaging and digital processing

System and method for measuring and improving overlay using electronic microscopic imaging and digital processing

US Patent 9793183 · Granted Oct 17, 2017

Estimated economic value: $4,768,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical transceiver with partition for preventing interference fit and optical s2025
Optical transceiver with separated heat dissipation components2024
Hierarchical density uniformization for semiconductor feature surface planarizat2023
Hierarchical density uniformization for semiconductor feature surface planarizat2021
Systems, devices, and methods for using a real time environment sensor in a FOUP2021
Optical transceiver2021
Systems, devices, and methods for using a real time environment sensor in a FOUP2020
Overlay structure and method of fabricating the same2020
Optical transceiver and optical subassembly thereof2020
System and method for measuring and improving overlay using electronic microscop2020
System and method for measuring and improving overlay using electronic microscop2020
System and method for measuring and improving overlay using electronic microscop2020