Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pulsed light beam spectral feature control

Pulsed light beam spectral feature control

US Patent 9785050 · Granted Oct 10, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus for and method of modulating a light source wavelength2025
Laser light energy and dose control using repetition rate based gain estimators2025
Method of compensating wavelength error induced by repetition rate deviation2023
Spectral feature selection and pulse timing control of a pulsed light beam2023
Fluorine detection in a gas discharge light source2023
Fluid pump with adaptive filter2023
Spectral feature selection and pulse timing control of a pulsed light beam2022
Laser light energy and dose control using repetition rate based gain estimators2021
Online calibration for repetition rate dependent performance variables2021
Wavelength stabilization for an optical source2020
Online calibration for repetition rate dependent performance variables2020
Lithographic apparatus and method2020