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Home › Compositions for cleaning III-V semiconductor materials and methods of using same

Compositions for cleaning III-V semiconductor materials and methods of using same

US Patent 9765288 · Granted Sep 19, 2017

Estimated economic value: $7,647,000 ⓘ

Assignee

Entegris

Inventors

Emanuel I. Cooper (72 patents)
Hsing-Chen Wu (9 patents)
Min-Chieh Yang (33 patents)
Sheng-Hung Tu (8 patents)
Li-Min Chen (32 patents)

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