Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Chamber cleaning method using F2 and a process for manufacture of F2 for this method

Chamber cleaning method using F2 and a process for manufacture of F2 for this method

US Patent 9757775 · Granted Sep 12, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Hydrogen fluoride supply unit2016
Method for the purification of fluorine2014