Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9757775 | Chamber cleaning method using F2 and a process for manufacture of F2 for this method | — | 2017-09-12 |
| 9334574 | Hydrogen fluoride supply unit | Alain Fobelets, Philippe Morelle, Peter M. Predikant, Maurizio Paganin | 2016-05-10 |
| 8821821 | Method for the purification of fluorine | Peter M. Predikant, Philippe Morelle, Maurizio Paganin, Christoph Sommer | 2014-09-02 |