Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Composition for nanoimprint and nanoimprint pattern forming method

Composition for nanoimprint and nanoimprint pattern forming method

US Patent 9746766 · Granted Aug 29, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of forming resist pattern and negative tone-development resist compositio2016
Compound, radical polymerization initiator, method for producing compound, polym2015
Resist composition for EUV or EB, and method of forming resist pattern2015
Resist composition, method of forming resist pattern, polymeric compound, and co2015
Resist composition, method of forming resist pattern and polymeric compound2015
Resist composition, method of forming resist pattern and polymeric compound2014
Positive resist composition and method of forming resist pattern2013