Substrate storage container

Assignee

• Shin-Etsu Polymer Co.
• Miraial Co.

Inventors

• Kazumasa Ohnuki (5 patents)
• Hiroyuki Shida (9 patents)
• Hiroki Yamagishi (15 patents)
• Tsuyoshi Nagashima (22 patents)
• Shuichi Inoue (26 patents)
• Chiaki Matsutori (33 patents)
• Takaharu Oyama (11 patents)

View full patent text on Google Patents →