Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method for supplying chemical solution on semiconductor substrate

Apparatus and method for supplying chemical solution on semiconductor substrate

US Patent 9707571 · Granted Jul 18, 2017

Estimated economic value: $2,403,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Surface clean system and method2025
System and method for correcting non-ideal wafer topography2025
Multi-functional shutter disk for thin film deposition chamber2025
Method for depositing target material in deposition chamber with tiltable workpi2025
Deposition system and method2025
Method for the transient expression of nucleic acids in plants2025
System and methods for controlling an amount of primer in a primer application g2025
Deposition system and method2024
Treatment system and method2024
Modified antimicrobial peptide derived from an arginine-rich domain2024
Method of manufacturing semiconductor wafer and cleaning scrubber2024
Semiconductor device and method of forming the same2024