Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multi-spot collection optics

Multi-spot collection optics

US Patent 9702983 · Granted Jul 11, 2017

Estimated economic value: $41,590,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Calibratable beam shaping system and method2017
Optical element for spatial beam shaping2017
Chamber elements and a method for placing a chamber at a load position2016
Calibratable beam shaping system and method2016
Spot grid array scanning system2008
Optical spot grid array scanning system2008
Polarization insensitive tunable optical filters2006
Wafer defect detection system with traveling lens multi-beam scanner2006
Wafer defect detection system with traveling lens multi-beam scanner2005
Wafer defect detection system with traveling lens multi-beam scanner2004
Data converter apparatus and method particularly useful for a database-to-object2002
Network communications link2001