Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Detecting arcing using processing chamber data

Detecting arcing using processing chamber data

US Patent 9653269 · Granted May 16, 2017

Estimated economic value: $17,932,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and systems of optical inspection of electronic device manufacturing mac2025
Oligomeric alkoxy amines2023
Determining susceptor service life in a plasma processing chamber2021
Lubricating compositions comprising thermoassociative and exchangeable copolymer2019
Method and system for identifying a clean endpoint time for a chamber2019
Method and system for identifying a clean endpoint time for a chamber2019
Chamber leak and gas contaimination detection2019
Chamber leak and gas contaimination detection2019
Detection of grounding strap breakage2018
Detection of grounding strap breakage2018
Detection of grounding strap breakage2018
Detection of grounding strap breakage2018