Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device

Assignee

• Hoya

Inventors

• Kazuhiro Hamamoto (40 patents)
• Toshihiko Orihara (16 patents)
• Tsutomu Shoki (76 patents)
• Junichi Horikawa (24 patents)

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