Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Actinic-ray- or radiation-sensitive resin composition, resist film therefrom and method of forming pattern therewith

Actinic-ray- or radiation-sensitive resin composition, resist film therefrom and method of forming pattern therewith

US Patent 9568824 · Granted Feb 14, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Prognosis determination device, prognosis determination program, and prognosis d2025
Semiconductor device2025
Communication system, control method, and storage medium2025
Treatment liquid and pattern forming method2025
Photosensitive resin composition, method for producing the same, resist film, pa2025
Vehicle interior lighting device2025
Control apparatus and method, and motor control system2024
Apparatus, information processing method, and computer-readable recording medium2024
Mass spectrometry method and mass spectrometer2024
Ion analysis device2024
Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sens2024
Mass spectrometry method and mass spectrometer2024