Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Center flex single side polishing head having recess and cap

Center flex single side polishing head having recess and cap

US Patent 9566687 · Granted Feb 14, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for implanting semiconductor structures with ions2025
Wafer boats for supporting semiconductor wafers in a furnace2025
Systems and methods for generating post-polishing topography for enhanced wafer 2025
Methods for processing semiconductor wafers having a polycrystalline finish2025
Systems for production of low oxygen content silicon2025
Systems and methods for controlling a gas dopant vaporization rate during a crys2025
Systems and methods for controlling a gas dopant vaporization rate during a crys2025
Wafer boats for supporting semiconductor wafers in a furnace2024
Systems for production of low oxygen content silicon2024
Ingot puller apparatus having heat shields with feet having an apex2024
Methods and systems of capturing transient thermal responses of regions of cryst2024
Process for preparing ingot having reduced distortion at late body length2024