Movement microelectromechanical systems (MEMS) package

Assignee

• TSMC

Inventors

• Shyh-Wei Cheng (21 patents)
• Chao-Po Lu (6 patents)
• Chung-Hsien Hun (1 patents)
• Chih-Shan Chen (29 patents)
• Chuan-Yi Ko (2 patents)
• Chih-Yu Wang (35 patents)
• Hsi-Cheng Hsu (31 patents)
• Ji-Hong Chiang (20 patents)
• Jui-Chun Weng (36 patents)
• Wei-Ding Wu (20 patents)

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